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TEMography Channel


JEM Toolbox 旧モデル対応表


旧モデル対応表

No. Group Function Old Model (*1)
01 Sys startJEM Create TemNet COM Automation server -
02 Sys startJEME Create TemNet COM Automation server (The event notification is set.) -
03 Sys initJEM Initiial value acquisition -
04 Sys exitJEM Quit the application and delete the object -
05 Sys finalJEM Finalize value set -
06 Sys receivenotify Receive Notify -
07 Sys regeve -
08 Sys listJEM Function list -
09 HT accvol Accelerating voltage -
10 HT filamentc Filament current OK
11 HT ht_status HT status -
12 HT beam Beam (LAB6 only) -
13 HT gvalve Gun valve (FEG only) -
14 EOS temasid TEM/ASID -
15 EOS soptsize Spot size -
16 EOS probemode Probe mode -
17 EOS alphasel Alpha selector -
18 EOS funcmode Function mode OK (Get Only)
19 EOS magsel MAG/camera length OK
20 EOS flcmode Free lens control mode -
21 EOS flcCL1 Condenser Lens1 -
22 EOS flcCL2 Condenser Lens2 -
23 EOS flcCL3 Condenser Lens3 -
24 EOS flcCM Condenser Mini Lens -
25 EOS flcOLf Objective Lens fine -
26 EOS flcOLc Objective Lens coarse -
27 EOS flcOM Objective Mini Lens -
28 EOS flcOM2 Objective Mini Lens2 -
29 EOS flcIL1 Intermediate Lens1 -
30 EOS flcIL2 Intermediate Lens2 -
31 EOS flcIL3 Intermediate Lens3 -
32 EOS flcIL4 Intermediate Lens4 -
33 EOS flcPL1 Projector Lens1 -
34 EOS flcPL2 Projector Lens2 -
35 EOS flcPL3 Projector Lens3 -
36 EOS flcOM2pole Objective Mini Lens2 polality -
37 EOS algGun1 Gun alignment1 OK
38 EOS algGun2 Gun alignment2 OK
39 EOS algSpot Spot alignment -
40 EOS algCL1 Condenser Lens alignment1 OK
41 EOS algCL2 Condenser Lens alignment2 OK
42 EOS algPL Projector Lens alignment OK
43 EOS defIS1 Image shift1 OK
44 EOS defIS2 Image shift2 OK
45 EOS stgCLs Condenser Lens stigma -
46 EOS stgOLs Objective Lens stigma -
47 EOS stgILs Intermediate Lens stigma -
48 EOS blnsshift Shift balance -
49 EOS blnstilt Tilt balance -
50 EOS blnsangle Angle balance -
51 EOS alg4detector detector alignment -
52 EOS focObj OBJ focus OK (Set only)
53 EOS focDif Diff focus -
54 EOS focIL Intermediate Lens dofus -
55 EOS focPL Projector Lens focus -
56 EOS focFL FL focus -
57 EOS bblanking beam blanking -
58 FILTER spcmmode Spctrum mode -
59 FILTER spcmval Get spectrum magnification -
60 FILTER engyshiftmode Energy shift mode -
61 FILTER engyshift Energy shift value -
62 FILTER slitwidth Slit width -
63 FILTER slitpos Slit position -
64 FILTER algFL1 FL alignment1 -
65 FILTER algFL2 FL alignment2 -
66 FILTER stgFL1 FL stig1 -
67 FILTER stgFL2 FL stig2 -
68 FILTER flcFLf FL fine -
69 FILTER flcFLc FL coarse -
70 FILTER compFL1 FL compensator1 -
71 FILTER compFL2 FL compensator2 -
72 STAGE stagepos Move Stage OK (Set only)
73 STAGE stageang Tilt stage OK (Set only)
74 STAGE stagepzpos Piezo position -
75 STAGE drivemethod Drive method -
76 STAGE stagestp Stage Stop OK
77 STAGE stagests Stage status OK
78 DETECTOR screenpos Screen position OK (Set only)
79 DETECTOR dtctrpos Detector position -
80 DETECTOR dtctrsigl Detector signal -
81 DETECTOR dtctrbrgt Detector brightness -
82 DETECTOR dtctrcrst Detector contrast -
83 APERTURE aperture Aperture -
84 PHOTO exptime Expture time -
85 PHOTO filmfeed Film feed mode -
86 PHOTO takephoto Take photo -
87 PHOTO cancelphoto Cancel photo -
88 PHOTO curntdnsty Current density -
89 PHOTO photostatus Photo status -
90 PHOTO mdsmode mDS mode -

(*1) JEM-1230, JEM-2010, JEM-2010F, JEM-3000F, JEM-3010, JEM-4010

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